瑞峰半導體導入晶圓級FIB, 建立可靠度與失效分析的程序,並持續發展必要的能力,以符合產品之品質與可靠度符合客戶要求。
Category | Equipment | Model | Capability |
---|---|---|---|
Reliability | HAST | KSON HAST-S PLUS | Temp: 105C~132C Humidity: 75% ~ 100% |
HTS | ESPEC PV-212M | 20C~200C | |
Failure Analysis | FE SEM | JEOL JSM-IT300HR | 5X ~ 600,000X |
Ion Milling | JEOL IB-19500CP | Ion Bean Etching and Cutting | |
Polisher | Struers Tegramin-20 | 40 ~ 600 rpm | |
Cutter | Struers Minitom | Low‐speed precision cut-off | |
Wafer Level SEM/FIB/EDS | FEI Helios 1200AT | Wafer level SEM for 300mm wafer |
如下所述之完善自動系統被應用到生產線,以確保沒有任何人為錯誤發生