Raytek introduced wafer level FIB , established the procedure of reliability & failure analysis. And continue to develop the necessary capability to match customer demanding in product reliability & quality.
Categor | Equipment | Model | Capability |
---|---|---|---|
Reliability | HAST | KSON HAST-S PLUS | Temp: 105C~132C Humidity: 75% ~ 100% |
HTS | ESPEC PV-212M | 20C~200C | |
Failure Analysis | FE SEM | JEOL JSM-IT300HR | 5X ~ 600,000X |
Ion Milling | JEOL IB-19500CP | Ion Bean Etching and Cutting | |
Polisher | Struers Tegramin-20 | 40 ~ 600 rpm | |
Cutter | Struers Minitom | Low‐speed precision cut-off | |
Wafer Level SEM/FIB/EDS | FEI Helios 1200AT | Wafer level SEM for 300mm wafer |
Robot systems below were applied into production line to assure without any of human mistake happening